2023 ASEE Annual Conference & Exposition

Using Virtual Reality Cleanroom Simulation in a Mixed Nanoelectronics Classroom

Presented at Work in Progress Papers in ECE

Given the strategic importance of the semiconductor manufacturing sector and the CHIPS Act impact on microelectronics, it is more imperative than ever to train the next generation of scientists and engineers in the field. However, this is a challenging feat since nanofabrication education uses hands-on cleanroom facilities. Since cleanrooms are expensive, have access constraints due to safety concerns, and offer limited instructional space, class sizes and outreach events are limited. To complement instruction in nanotechnology education, there is some open- or educational-access software, which is computer-based and focuses only on training for individual equipment, not on the typical workflow for device fabrication. The objective of this work was to develop an accessible virtual reality ecosystem that provides an immersive education and outreach on device nanofabrication that is user-friendly for a broad range of audiences. At our university, a virtual reality cleanroom prototype has been developed. It consists of a 45-minute gameplay module that covers the process flow for the fabrication of micro-scale resistors, from sample preparation to electrical characterization.

We also performed a mixed methods study to investigate how 5 students in a nanoelectronics course utilized this virtual reality cleanroom prototype and what changes they recommend to improve its user interface and learner experience. The study population for this work-in-progress consisted of students enrolled in a nanoelectronics course at our university during the 2022-2023 school year. Students taking this course can be undergraduate (junior or senior) or graduate (masters or PhD). The research questions for this study were 1) what is the user experience with the virtual reality cleanroom prototype, 2) what challenges, if any, did students experience, and 3) what changes did students recommend to improve the virtual reality cleanroom prototype learner experience? Preliminary results indicate that the students found the virtual reality cleanroom simulator helpful in repeatedly exploring the cleanroom space and the nanofabrication process flow in a safe way, thus developing more confidence in utilizing the actual cleanroom facility. The results of this study will provide insight on the design of future modules with more complicated levels and device process flows. Moreover, the study could inform the development of other virtual reality simulators for other lab activities. The improved usability of the proposed software could provide students in large classes or attending online programs in electrical and computer engineering, as well as K-12 students participating in nanotechnology-related outreach events, the opportunity to conduct realistic process workflows, learn first-hand about nanofabrication, and practice using a nanofabrication lab via trial and error in a safe virtual environment.

Authors

Sean Letavish [biography]

Sean Letavish has a BSc degree (2022) and a MSc degree (2023), both in Electrical Engineering from George Washington University. His interests lie at the intersection of virtual / augmented reality and engineering education. He has worked on a virtual reality cleanroom simulator to teach difficult concepts and skills such as nanofabrication and semiconductor manufacturing to support access and hands-on learning for a broad diversity of students and interested audiences.
Ani Meliksetyan [biography]

Ani Meliksetyan is a second-year interdisciplinary doctoral program student (Human and Technology Collaboration) at the George Washington University, Graduate School of Education and Human Development. Her research interests lie at the intersection of education technology, human-centered Artificial Intelligence and decision making, professional/adult learning, recognition of diverse forms of learning and creation of academic pathways. She envisages harnessing the power of data science and responsible use of Artificial Intelligence in education for the purpose of inviting equitable participation, creating paths to quality employment, and inducing social mobility for the most underserved.
Victoria Ravel [biography]

Victoria Ravel is an undergraduate senior biomedical engineering student at George Washington University minoring in Electrical and Computer Engineering. She has expertise in micro and nanofabrication processes.
Dr. Hurriyet Aydin Ok GWU [biography]

Dr. Hurriyet Aydin Ok is a senior research fellow at GWU Cyber Security & Privacy Research Institute (CSPRI) and teaches courses in E-Commerce Security and Augmented and Virtual Reality. Prior to GWU, Hurriyet was a member of the IT leadership team for over 24 years at the World Bank Group, and contributed in the areas of enterprise architecture, cybersecurity, identity and access management, new technology infrastructure strategy, and IT learning and career development. Dr. Ok is the Founder of VRT-U, LLC, a startup technology venture focusing on Augmented and Virtual Reality for creating immersive learning content.

Hurriyet was a software engineer at Alcatel-Rovsing in Copenhagen, Denmark, developing software for American Airlines Data Network. Dr. Ok holds a D.Sc. Degree in Computer Science from the GWU, and M.S. and B.S. Degrees in Computer Science from Hacettepe University, Ankara, Turkey.
Dr. Natalie B. Milman The George Washington University [biography]

Natalie B. Milman, Ph.D. is Chair of the Department of Educational Leadership and Professor of Educational Technology at The George Washington University's Graduate School of Education and Human Development. She is also a member of the interdisciplinary Human-Technology Collaborations PhD program and research lab (go.gwu.edu/htc), a member of GW’s Academy of Distinguished Teachers, and winner of the 2017 Bender Teaching Award. Her research focuses on the design of instruction and models for the effective leadership and integration of technology at all academic levels; issues of diversity, inclusion, and digital equity.
Dr. Gina C. Adam http://orcid.org/0000-0003-0027-1145 The George Washington University [biography]

Gina C. Adam is an assistant professor in the Department of Electrical and Computer Engineering at George Washington University. Apart from her work in memristive devices and circuits for novel computing, she is also interested in content knowledge acquisition in engineering education and emerging learning technologies for nanofabrication and semiconductor manufacturing.

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