2026 ASEE Annual Conference & Exposition

Semiconductor manufacturing training is often constrained by high equipment costs, hazardous materials, and limited access to cleanroom facilities. To address these challenges, this study investigates the efficacy of a standalone immersive Virtual Reality (VR) training system designed to support photolithography instruction. Using a single-group pre- and post-test experimental design with 10 electrical engineering students, the study evaluated within-subject changes in conceptual knowledge and self-efficacy while examining technology acceptance and usability. Results indicated that the VR intervention yielded significant improvements in both knowledge (p < .001, d = 1.86) and self-efficacy (p < .05, d = 0.77), positioning the system as a valid environment for procedural skill acquisition. Furthermore, regression analysis supported the Technology Acceptance Model (TAM), revealing that Perceived Ease of Use significantly predicted Perceived Usefulness (R2 = .895). However, findings also highlighted a significant negative correlation between cognitive load and system usability (r = -.85), suggesting that high mental workload can diminish user acceptance and sense of agency. These findings suggest that while VR is a powerful tool for specialized engineering education, instructional designers must prioritize interaction simplicity and cognitive load management to ensure technology acceptance and learning effectiveness.