2026 ASEE Annual Conference & Exposition

NSF IUSE - From Simulation to Skills: VR-Powered Cleanroom Fabrication Training

Presented at NSF Grantees Poster Session II

We present a study using a portable, standalone VR system for cleanroom fabrication training. This work explores the use of immersive virtual reality (VR) as a preparatory training tool for cleanroom photolithography in an undergraduate engineering laboratory course. Ten students enrolled in a senior-level MEMS lab completed VR-based practice prior to performing procedures in a physical cleanroom. Student performance was evaluated using a standardized rubric, and learning experiences were examined through semi-structured interviews. Results indicate high procedural accuracy in the physical lab and increased student confidence, reduced equipment-related anxiety, and improved familiarity with cleanroom workflows. These findings suggest that VR-based training can effectively support skill development and transfer in high-stakes engineering laboratory environments.

Authors
  1. Xinhao Xu Orcid 16x16http://orcid.org/0000-0002-4981-4641 University of Missouri - Columbia
  2. Mahmoud Almasri University of Missouri - Columbia
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