2025 ASEE Annual Conference & Exposition

The rapid advancement of semiconductor technology, fueled by initiatives such as the CHIPS and Science Act, highlights an urgent need to develop a skilled workforce within the semiconductor industry. Signed into law two years ago, the CHIPS Act allocates nearly $53 billion to revitalize U.S. semiconductor supply chains, create jobs, and enhance national security, with over $30 billion in proposed investments already announced to generate more than 115,000 manufacturing and construction jobs nationwide.

This paper introduces an innovative virtual reality (VR) and augmented reality (AR) cleanroom environment aimed at enhancing experiential learning in semiconductor nanofabrication processes. By leveraging immersive technologies, the simulation provides an interactive and safe environment where students can explore and practice essential cleanroom protocols and nanofabrication techniques. The VR/AR cleanroom features an intelligent monitoring system that offers real-time feedback, evaluating student actions, identifying errors, and providing corrective suggestions instantaneously. This capability enables students to refine their skills effectively while tracking their progress through guided tutorials and performance assessments.

The paper will provide preliminary assessment results of students' understanding and retention of complex concepts, along with motivation and engagement. This research underscores the transformative potential of VR and AR in semiconductor education, addressing the workforce gap identified by the CHIPS Act and offering scalable solutions to meet the growing demand for skilled professionals in the field. Ultimately, the integration of these technologies may revolutionize training methods, making high-quality education more accessible to a broader student population.