2025 ASEE Annual Conference & Exposition

Fabricating the Invisible: A Case Study of Observing Nano with the NanoFrazor

Presented at ELOS Technical Session 1: Integrating AI, VR, and MR in Engineering Lab Experiences

Nanotechnology has impacted modern societies’ way of life with its applications spanning a wide range of industries, from consumer goods and pharmaceuticals to semiconductor manufacturing. Most people interact with nanotechnology every day whether they are aware of it or not. Nanofabrication, the technique through which nanotechnologies are created, is a process that involves manipulating materials at the nanoscale (10-9 meters). To make nanotechnology more appealing to the inexperienced, we are interested in developing laboratory and teaching modules that make the nano seeable. To achieve this target, we utilize a nanofabrication tool called the NanoFrazor, developed by Heidelberg Instruments Nano, where we believe that observation leads to understanding.

The NanoFrazor system is a nanofabrication tool that utilizes thermal scanning probe lithography (t-SPL) to generate and observe nanopatterns in real time. The NanoFrazor tool does this by relying on three main technology pillars: the thermal cantilever, the thermally sensitive resist, and the closed-loop lithography (CLL) operation. Briefly, the thermal cantilever has an ultrasharp tip (< 5 nm in radius) with a resistive heating element, a topography sensor, and a capacitive platform for electrostatic actuation integrated directly into the cantilever. The thermally sensitive resist is a polymer that undergoes direct thermal modification at a modest temperature. Finally, the CLL operation completes the nanofabrication process of the NanoFrazor by offering a software solution to pattern and measure nanofeatures in real time. This is how the NanoFrazor turns seeing into believing and allows us to tackle nanofabrication education.

Despite its prevalence in today’s world, educational opportunities in the field of nanofabrication are scarce. Our goal in this work was to develop educational and training materials for nanofabrication centered around the NanoFrazor tool to specifically make nanofabrication topics more accessible. For this work, we targeted undergraduate and graduate students with no prior experience with nanotechnology. To accomplish our goal, three objectives were put in place. First, effective teaching methods for nanofabrication needed to be determined. Secondly, education and training materials were created based on the NanoFrazor tool which was tailored for undergraduate and graduate students with no prior knowledge of nanotechnology. Finally, the effectiveness of the proposed training materials for increasing participants’ basic knowledge of nanofabrication was evaluated.

Authors

Dr. Nicholas Hendricks Heidelberg Instruments Nano AG [biography]

Born and raised in Cleveland/Dayton, Ohio, United States, Nick studied chemistry with a focus on polymers during his undergraduate studies at Wright State University. For his graduate studies, Nick went to the University of Massachusetts Amherst to continue studying polymers and materials and graduated with his doctorate in polymer science and engineering.

During his studies, he had the chance to work in numerous internship positions for companies such as General Motors, British Petroleum, Wright Patterson Air Force Base, Intel, and Victoria University of Wellington, New Zealand. After graduation, he worked in various science and engineering positions from photolithography process development at Micron Technology in Boise, Idaho, United States to more academic related work at ETH Zürich in the group of Prof. Rachel Grange and the Swiss Center for Electronics and Microtechnology (CSEM). Nick is the Innovation Manager at Heidelberg Instruments Nano where he explores future product solutions for the NanoFrazor, thermal scanning probe lithography, and nanofabrication in general.

In his free time, Nick enjoys running, watching Cleveland sports, and traveling.
Tanisha Gupta Worcester Polytechnic Institute [biography]

Tanisha Gupta is currently pursuing a Bachelor of Science degree in Biomedical Engineering at Worcester Polytechnic Institute (WPI). She has worked on several projects, including her Interactive Qualifying Project in collaboration with Heidelberg Instruments Nano AG, which focused on demystifying nanofabrication and developing educational materials for beginners in nanoscience. On campus, Tanisha serves as Vice President of WPI's chapter of the Society of Women Engineers, is a Global Ambassador for the Global Experience Office and works as a Peer Learning Assistant for Introduction to Biomechanics.
Dr. Emine Cagin Heidelberg Instruments Nano AG [biography]

Dr. Emine Cagin is the CTO of Heidelberg Instruments Nano AG, where the NanoFrazor is developed and supported. She has many years of experience in nanofabrication, through her research and product development work throughout her career. She is enthusiastic about making nanofabrication accessible to students and researchers of many backgrounds.
Brett Michael Mann Worcester Polytechnic Institute [biography]

Brett Mann is currently pursuing a Bachelor of Science degree in Electrical and Computer Engineering at Worcester Polytechnic Institute (WPI), with concentrations in Computer Engineering and RF Engineering. As part of his studies, Brett has worked on several projects, including a research collaboration with Heidelberg Instruments Nano AG, aimed at demystifying nanofabrication and lowering barriers to entry in the field of nanoscience. He has also completed multiple internships, working as a Program Manager intern at SRGE Inc., and completing two engineering internships with BAE Systems Inc., where he supported the Integrated Test Engineering team and the Hardware Engineering team. On campus, Brett is an active member of the Green Team sustainability club, works as a campus tour guide for the Office of Admissions, and is a member of the Phi Theta Kappa Honor Society.
Sophia Reynolds Worcester Polytechnic Institute [biography]

Sophia Reynolds is currently pursuing a Bachelor of Science in Biomedical Engineering at Worcester Polytechnic Institute (WPI). Sophia is an undergraduate research assistant in the Musculoskeletal Biomechanics Lab run by Professor Karen Troy at WPI. In addition, on campus she is a member of the varsity cross country and track and field teams, Society of Women Engineers, and Alpha Eta Mu Beta Biomedical Engineering Honors Society.
Prof. Nancy Burnham Worcester Polytechnic Institute [biography]

Professor Burnham investigates nanomaterials, principally with atomic-force microscopy (AFM). She also teaches AFM to undergraduates and graduate students. AFM technology overlaps with the technology behind the NanoFrazor tool discussed in this presentation.
John Andrew DePalma Worcester Polytechnic Institute [biography]

John DePalma is an upcoming senior at Worcester Polytechnic Institute (WPI). He is a mechanical engineering major and enjoys specifically working with computer aided design (CAD). He has worked with Heidelberg Instruments Nano to make their nanofabrication tools more accessible and useable for education. John has worked as a manufacturing engineer intern at Jonal Laboratories in Connecticut, where he improved assembly processes and designed fixtures for polymer and elastomer sealing products. He works at WPI as a lifeguard at the Sports and Recreation Center and is serving as President of the Underwater Hockey Club.
Prof. Carolina Ruiz Worcester Polytechnic Institute (WPI) [biography]

Carolina Ruiz, PhD, is the Harold L. Jurist ’61 and Heather E. Jurist Dean's Professor of Computer Science and the Associate Dean of Arts and Sciences at Worcester Polytechnic Institute (WPI). Her research is in artificial intelligence and machine learning, and their applications to medicine and health. She is a founding and core member of the Bioinformatics and Computational Biology, the Data Science, and the Neuroscience Programs at WPI. Carolina has advised dozens of MS and PhD students and hundreds of undergraduate students in disciplinary and interdisciplinary research projects. Her research has been supported by the National Institutes of Health (NIH), the National Science Foundation (NSF), and the Henry Luce Foundation. Carolina has served on the organizing committees and the program committees of over 80 international research conferences. https://www.wpi.edu/people/faculty/ruiz
Jeffrey Solomon Worcester Polytechnic Institute
Jonas Vergés

Note

The full paper will be available to logged in and registered conference attendees once the conference starts on June 22, 2025, and to all visitors after the conference ends on June 25, 2025

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