2025 ASEE Annual Conference & Exposition

Seeing is Believing - How the NanoFrazor Generates and Sees Nano in Real Time

Presented at Instrumentation Methods and Techniques

The shortage of semiconductor workers is a crisis that is grabbing the global semiconductors companies’ attention today. With the global semiconductor industry expected to generate more than a trillion United States dollars by 20301, this is an important global industry where a lack of qualified semiconductor workers could derail this target. With this issue being of high importance, there is a significant amount of investment being made to address workforce development. We at Heidelberg Instruments Nano believe we can make a small but significant contribution to this workforce development effort by making the nano visible in real-time.

The NanoFrazor is a nanofabrication tool that utilizes thermal scanning probe lithography (t-SPL) to generate nanopatterns. An ultrasharp thermal probe (< 5 nm in radius) is used on thermally sensitive resist materials to pattern designs onto arbitrary surfaces. The NanoFrazor features a closed-loop lithography approach, where the written structures are measured and adapted during the patterning session. The detection capability is also what makes it possible for users to see the nanostructures in real time. Using this method, novice users can start writing their first nanopatterns within an hour of training, making the NanoFrazor a high potential tool for introducing new populations to nanofabrication.

In a collaboration building on the 10+ years of nanofabrication experience at Heidelberg Instruments Nano and project-based learning expertise at Worcester Polytechnic Institute, we took additional steps to evaluate how the NanoFrazor could be used in both classroom and laboratory settings. A series of teaching materials for active learning opportunities were developed, ranging from guided laboratory exercises to self-learning videos with embedded quizzes. Sample lecture slides to make it easier to integrate the new materials into conventional courses were developed, providing an efficient way to include background know-how and context for faculty and students alike. The goal of this work is to trigger initial or further interest in nanofabrication and, ultimately, interest in the semiconductor industry. In this presentation, we will briefly introduce the NanoFrazor technology and then discuss the course and laboratory modules that have been developed that show how t-SPL can be used as a technique for bridging nanotechnology theory into practice by showing the generation of nanostructures in real time right before an audience.

[1] Deloitte. “The Global Semiconductor Talent Shortage Report”

Authors

Dr. Nicholas Hendricks Heidelberg Instruments Nano AG [biography]

Born and raised in Cleveland/Dayton, Ohio, United States, Nick studied chemistry with a focus on polymers during his undergraduate studies at Wright State University. For his graduate studies, Nick went to the University of Massachusetts Amherst to continue studying polymers and materials and graduated with his doctorate in polymer science and engineering.

During his studies, he had the chance to work in numerous internship positions for companies such as General Motors, British Petroleum, Wright Patterson Air Force Base, Intel, and Victoria University of Wellington, New Zealand. After graduation, he worked in various science and engineering positions from photolithography process development at Micron Technology in Boise, Idaho, United States to more academic related work at ETH Zürich in the group of Prof. Rachel Grange and the Swiss Center for Electronics and Microtechnology (CSEM). Nick is the Innovation Manager at Heidelberg Instruments Nano where he explores future product solutions for the NanoFrazor, thermal scanning probe lithography, and nanofabrication in general.

In his free time, Nick enjoys running, watching Cleveland sports, and traveling.
Dr. Emine Cagin Heidelberg Instruments Nano AG [biography]

Dr. Emine Cagin is the CTO of Heidelberg Instruments Nano AG, where the NanoFrazor is developed and supported. She has many years of experience in nanofabrication, through her research and product development work throughout her career. She is enthusiastic about making nanofabrication accessible to students and researchers of many backgrounds.
Prof. Nancy Burnham Worcester Polytechnic Institute [biography]

Professor Burnham investigates nanomaterials, principally with atomic-force microscopy (AFM). She also teaches AFM to undergraduates and graduate students. AFM technology overlaps with the technology behind the NanoFrazor tool discussed in this presentation.
Tanisha Gupta Worcester Polytechnic Institute [biography]

Tanisha Gupta is currently pursuing a Bachelor of Science degree in Biomedical Engineering at Worcester Polytechnic Institute (WPI). She has worked on several projects, including her Interactive Qualifying Project in collaboration with Heidelberg Instruments Nano AG, which focused on demystifying nanofabrication and developing educational materials for beginners in nanoscience. On campus, Tanisha serves as Vice President of WPI's chapter of the Society of Women Engineers, is a Global Ambassador for the Global Experience Office and works as a Peer Learning Assistant for Introduction to Biomechanics.
Brett Michael Mann Worcester Polytechnic Institute [biography]

Brett Mann is currently pursuing a Bachelor of Science degree in Electrical and Computer Engineering at Worcester Polytechnic Institute (WPI), with concentrations in Computer Engineering and RF Engineering. As part of his studies, Brett has worked on several projects, including a research collaboration with Heidelberg Instruments Nano AG, aimed at demystifying nanofabrication and lowering barriers to entry in the field of nanoscience. He has also completed multiple internships, working as a Program Manager intern at SRGE Inc., and completing two engineering internships with BAE Systems Inc., where he supported the Integrated Test Engineering team and the Hardware Engineering team. On campus, Brett is an active member of the Green Team sustainability club, works as a campus tour guide for the Office of Admissions, and is a member of the Phi Theta Kappa Honor Society.
Sophia Reynolds Worcester Polytechnic Institute [biography]

Sophia Reynolds is currently pursuing a Bachelor of Science in Biomedical Engineering at Worcester Polytechnic Institute (WPI). Sophia is an undergraduate research assistant in the Musculoskeletal Biomechanics Lab run by Professor Karen Troy at WPI. In addition, on campus she is a member of the varsity cross country and track and field teams, Society of Women Engineers, and Alpha Eta Mu Beta Biomedical Engineering Honors Society.
John Andrew DePalma Worcester Polytechnic Institute
Prof. Carolina Ruiz Worcester Polytechnic Institute (WPI) [biography]

Carolina Ruiz, PhD, is the Harold L. Jurist ’61 and Heather E. Jurist Dean's Professor of Computer Science and the Associate Dean of Arts and Sciences at Worcester Polytechnic Institute (WPI). Her research is in artificial intelligence and machine learning, and their applications to medicine and health. She is a founding and core member of the Bioinformatics and Computational Biology, the Data Science, and the Neuroscience Programs at WPI. Carolina has advised dozens of MS and PhD students and hundreds of undergraduate students in disciplinary and interdisciplinary research projects. Her research has been supported by the National Institutes of Health (NIH), the National Science Foundation (NSF), and the Henry Luce Foundation. Carolina has served on the organizing committees and the program committees of over 80 international research conferences. https://www.wpi.edu/people/faculty/ruiz
Jeffrey Solomon Worcester Polytechnic Institute
Jonas Vergés

Note

The full paper will be available to logged in and registered conference attendees once the conference starts on June 22, 2025, and to all visitors after the conference ends on June 25, 2025

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